X-ray Photoelectron Spectroscopy Analysis of Nitrogen-Doped TiO<sub>2</sub> Films Prepared by Reactive-Ion-Beam Sputtering with Various NH<sub>3</sub>/O<sub>2</sub> Gas Mixture Ratios
Nitrogen-doped TiO<sub>2</sub> films were prepared by reactive ion-beam sputtering deposition (IBSD) in a mixed atmosphere of NH<sub>3</sub> and O<sub>2</sub> at a substrate temperature of 400 °C. X-ray photoelectron spectra revealed the presence of six i...
Main Authors: | , , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2020-01-01
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Series: | Coatings |
Subjects: | |
Online Access: | https://www.mdpi.com/2079-6412/10/1/47 |