Gravimetric methods for determining porosity of anodically treated silicon: features of realization and accuracy estimation

Gravimetric methods for determining porosity of anodically treated silicon: features of realization and accuracy estimation

The results of the storage time and temperature processing influence on the porosity of porous silicon are presented. Porosity of the porous silicon samples was calculated by two gravimetric methods: a semi-destructive and destructive. A qualitative and quantitative comparison of two gravimetric met...

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Bibliographic Details
Main Authors: S. A. Zavatski, A. V. Bondarenko
Format: Article
Language:Russian
Published: Educational institution «Belarusian State University of Informatics and Radioelectronics» 2019-06-01
Series:Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki
Subjects:
porous silicon
ps
porosity
gravimetric methods
Online Access:https://doklady.bsuir.by/jour/article/view/928

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