Physical properties of nanostructured ZnO thin films deposited by DC magnetron sputtering method with different volume of O2 in carrier gas
High-quality ZnO thin films with polycrystalline hexagonal structure and (101) preferentially oriented were deposited on Si and corning glass substrates by reactive direct current magnetron sputtering. The effects of different oxygen concentration in carrier gas on structural, morphological and opti...
| Main Authors: | , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Technical Faculty, Bor
2019-01-01
|
| Series: | Journal of Mining and Metallurgy. Section B: Metallurgy |
| Subjects: | |
| Online Access: | http://www.doiserbia.nb.rs/img/doi/1450-5339/2019/1450-53391900011A.pdf |