Electrooptical Characterization of New Classes of Silicon Carbide UV Photodetectors
In this paper, we present the fabrication process steps and the characterization of 4H-SiC vertical Schottky UV detectors, where interdigitated strips, acting as top metal contacts, have been realized in Ni<sub>2</sub>Si. These devices exploit the pinch-off surface effect. I-V and C-V ch...
| Main Authors: | , , , , , , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IEEE
2014-01-01
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| Series: | IEEE Photonics Journal |
| Online Access: | https://ieeexplore.ieee.org/document/6887321/ |