Magnetron Sputtering of Polymeric Targets: From Thin Films to Heterogeneous Metal/Plasma Polymer Nanoparticles

Magnetron Sputtering of Polymeric Targets: From Thin Films to Heterogeneous Metal/Plasma Polymer Nanoparticles

Magnetron sputtering is a well-known technique that is commonly used for the deposition of thin compact films. However, as was shown in the 1990s, when sputtering is performed at pressures high enough to trigger volume nucleation/condensation of the supersaturated vapor generated by the magnetron, v...

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Bibliographic Details
Main Authors: Ondřej Kylián, Artem Shelemin, Pavel Solař, Pavel Pleskunov, Daniil Nikitin, Anna Kuzminova, Radka Štefaníková, Peter Kúš, Miroslav Cieslar, Jan Hanuš, Andrei Choukourov, Hynek Biederman
Format: Article
Language:English
Published: MDPI AG 2019-07-01
Series:Materials
Subjects:
magnetron sputtering
nanoparticles
gas aggregation sources
Online Access:https://www.mdpi.com/1996-1944/12/15/2366

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