Microstructure and Mechanical Property Investigation of TaSiN Thin Films Deposited by Reactive Magnetron Sputtering
Tantalum silicon nitride (Ta−Si−N) films were synthesized on Si substrate via magnetron sputtering. The structure and properties of the Ta−Si−N films were investigated as a function of the N<sub>2</sub> content in the N<sub>2</sub>/Ar g...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2019-05-01
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| Series: | Coatings |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2079-6412/9/5/338 |