Cathode Design Optimization toward the Wide-Pressure-Range Miniature Discharge Ion Source for a Vacuum Micropump

Cathode Design Optimization toward the Wide-Pressure-Range Miniature Discharge Ion Source for a Vacuum Micropump

It is difficult to generate and maintain the vacuum level in vacuum MEMS (Micro-Electro-Mechanical Systems) devices. Currently, there is still no single method or device capable of generating and maintaining the desired vacuum level in a vacuum device for a long time. This paper proposed a new wide-...

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Bibliographic Details
Main Authors: Tongtong Yao, Fei Tang, Jian Zhang, Xiaohao Wang
Format: Article
Language:English
Published: MDPI AG 2019-02-01
Series:Sensors
Subjects:
vacuum MEMS
ion source
discharge
atmosphere to high vacuum
vacuum micropump
Online Access:https://www.mdpi.com/1424-8220/19/3/624

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