Surface Acoustic WaveAmmonia Sensors Based on ST-cut Quartz under Periodic Al Structure

Surface acoustic wave (SAW) devices are key components for sensing applications. SAW propagation under a periodic grating was investigated in this work. The theoretical method used here is the space harmonic method. We also applied the results of SAW propagation studied in this work to design a two-...

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Bibliographic Details
Main Authors: Ming-Yau Su, Rume-Tze Tsai, Chi-Yen Shen, Cheng-Liang Hsu
Format: Article
Language:English
Published: MDPI AG 2009-02-01
Series:Sensors
Subjects:
Online Access:http://www.mdpi.com/1424-8220/9/2/980/