Gas sensing properties of nanocrystalline diamond at room temperature
This study describes an integrated NH3 sensor based on a hydrogenated nanocrystalline diamond (NCD)-sensitive layer coated on an interdigitated electrode structure. The gas sensing properties of the sensor structure were examined using a reducing gas (NH3) at room temperature and were found to be de...
Main Authors: | , , , , , |
---|---|
Format: | Article |
Language: | English |
Published: |
Beilstein-Institut
2014-12-01
|
Series: | Beilstein Journal of Nanotechnology |
Subjects: | |
Online Access: | https://doi.org/10.3762/bjnano.5.243 |