Simulations of the Ultra-Fast Kinetics in Ni-Si-C Ternary Systems under Laser Irradiation
We present a method for the simulation of the kinetic evolution in the sub µs timescale for composite materials containing regions occupied by alloys, compounds, and mixtures belonging to the Ni-Si-C ternary system. Pulsed laser irradiation (pulses of the order of 100 ns) promotes this evolution. Th...
Main Authors: | , , , , , , , , , , |
---|---|
Format: | Article |
Language: | English |
Published: |
MDPI AG
2021-08-01
|
Series: | Materials |
Subjects: | |
Online Access: | https://www.mdpi.com/1996-1944/14/16/4769 |
id |
doaj-4835db423e8143d5ae75140afd9fc31d |
---|---|
record_format |
Article |
spelling |
doaj-4835db423e8143d5ae75140afd9fc31d2021-08-26T14:01:49ZengMDPI AGMaterials1996-19442021-08-01144769476910.3390/ma14164769Simulations of the Ultra-Fast Kinetics in Ni-Si-C Ternary Systems under Laser IrradiationSalvatore Sanzaro0Corrado Bongiorno1Paolo Badalà2Anna Bassi3Ioannis Deretzis4Marius Enachescu5Giovanni Franco6Giuseppe Fisicaro7Patrizia Vasquez8Alessandra Alberti9Antonino La Magna10CNR-IMM, Zona Industriale Strada VIII 5, 95121 Catania, ItalyCNR-IMM, Zona Industriale Strada VIII 5, 95121 Catania, ItalySTMicroelectronics, Zona Industriale Stradale Primosole 50, 95121 Catania, ItalySTMicroelectronics, Zona Industriale Stradale Primosole 50, 95121 Catania, ItalyCNR-IMM, Zona Industriale Strada VIII 5, 95121 Catania, ItalyCenter for Surface Science and Nanotechnology, University Politehnica of Bucharest, Splaiul Independentei nr. 313, AN031, District 6, 060042 Bucharest, RomaniaSTMicroelectronics, Zona Industriale Stradale Primosole 50, 95121 Catania, ItalyCNR-IMM, Zona Industriale Strada VIII 5, 95121 Catania, ItalySTMicroelectronics, Zona Industriale Stradale Primosole 50, 95121 Catania, ItalyCNR-IMM, Zona Industriale Strada VIII 5, 95121 Catania, ItalyCNR-IMM, Zona Industriale Strada VIII 5, 95121 Catania, ItalyWe present a method for the simulation of the kinetic evolution in the sub µs timescale for composite materials containing regions occupied by alloys, compounds, and mixtures belonging to the Ni-Si-C ternary system. Pulsed laser irradiation (pulses of the order of 100 ns) promotes this evolution. The simulation approach is formulated in the framework of the phase-field theory and it consists of a system of coupled non-linear partial differential equations (PDEs), which considers as variables the following fields: the laser electro-magnetic field, the temperature, the phase-field and the material (Ni, Si, C, C clusters and Ni-silicides) densities. The model integrates a large set of materials and reaction parameters which could also self-consistently depend on the model variables. A parameter calibration is also proposed, specifically suited for the wavelength of a widely used class of excimer lasers (<i>λ</i> = 308 nm). The model is implemented on a proprietary laser annealing technology computer-aided design (TCAD) tool based on the finite element method (FEM). This integration allows, in principle, numerical solutions in systems of any dimension. Here we discuss the complex simulation trend in the one-dimensional case, considering as a starting state, thin films on 4H-SiC substrates, i.e., a configuration reproducing a technologically relevant case study. Simulations as a function of the laser energy density show an articulated scenario, also induced by the variables’ dependency of the materials’ parameters, for the non-melting, partial-melting and full-melting process conditions. The simulation results are validated by post-process experimental analyses of the microstructure and composition of the irradiated samples.https://www.mdpi.com/1996-1944/14/16/4769Ni-Si-C ternary systemlaser annealingfinite element method |
collection |
DOAJ |
language |
English |
format |
Article |
sources |
DOAJ |
author |
Salvatore Sanzaro Corrado Bongiorno Paolo Badalà Anna Bassi Ioannis Deretzis Marius Enachescu Giovanni Franco Giuseppe Fisicaro Patrizia Vasquez Alessandra Alberti Antonino La Magna |
spellingShingle |
Salvatore Sanzaro Corrado Bongiorno Paolo Badalà Anna Bassi Ioannis Deretzis Marius Enachescu Giovanni Franco Giuseppe Fisicaro Patrizia Vasquez Alessandra Alberti Antonino La Magna Simulations of the Ultra-Fast Kinetics in Ni-Si-C Ternary Systems under Laser Irradiation Materials Ni-Si-C ternary system laser annealing finite element method |
author_facet |
Salvatore Sanzaro Corrado Bongiorno Paolo Badalà Anna Bassi Ioannis Deretzis Marius Enachescu Giovanni Franco Giuseppe Fisicaro Patrizia Vasquez Alessandra Alberti Antonino La Magna |
author_sort |
Salvatore Sanzaro |
title |
Simulations of the Ultra-Fast Kinetics in Ni-Si-C Ternary Systems under Laser Irradiation |
title_short |
Simulations of the Ultra-Fast Kinetics in Ni-Si-C Ternary Systems under Laser Irradiation |
title_full |
Simulations of the Ultra-Fast Kinetics in Ni-Si-C Ternary Systems under Laser Irradiation |
title_fullStr |
Simulations of the Ultra-Fast Kinetics in Ni-Si-C Ternary Systems under Laser Irradiation |
title_full_unstemmed |
Simulations of the Ultra-Fast Kinetics in Ni-Si-C Ternary Systems under Laser Irradiation |
title_sort |
simulations of the ultra-fast kinetics in ni-si-c ternary systems under laser irradiation |
publisher |
MDPI AG |
series |
Materials |
issn |
1996-1944 |
publishDate |
2021-08-01 |
description |
We present a method for the simulation of the kinetic evolution in the sub µs timescale for composite materials containing regions occupied by alloys, compounds, and mixtures belonging to the Ni-Si-C ternary system. Pulsed laser irradiation (pulses of the order of 100 ns) promotes this evolution. The simulation approach is formulated in the framework of the phase-field theory and it consists of a system of coupled non-linear partial differential equations (PDEs), which considers as variables the following fields: the laser electro-magnetic field, the temperature, the phase-field and the material (Ni, Si, C, C clusters and Ni-silicides) densities. The model integrates a large set of materials and reaction parameters which could also self-consistently depend on the model variables. A parameter calibration is also proposed, specifically suited for the wavelength of a widely used class of excimer lasers (<i>λ</i> = 308 nm). The model is implemented on a proprietary laser annealing technology computer-aided design (TCAD) tool based on the finite element method (FEM). This integration allows, in principle, numerical solutions in systems of any dimension. Here we discuss the complex simulation trend in the one-dimensional case, considering as a starting state, thin films on 4H-SiC substrates, i.e., a configuration reproducing a technologically relevant case study. Simulations as a function of the laser energy density show an articulated scenario, also induced by the variables’ dependency of the materials’ parameters, for the non-melting, partial-melting and full-melting process conditions. The simulation results are validated by post-process experimental analyses of the microstructure and composition of the irradiated samples. |
topic |
Ni-Si-C ternary system laser annealing finite element method |
url |
https://www.mdpi.com/1996-1944/14/16/4769 |
work_keys_str_mv |
AT salvatoresanzaro simulationsoftheultrafastkineticsinnisicternarysystemsunderlaserirradiation AT corradobongiorno simulationsoftheultrafastkineticsinnisicternarysystemsunderlaserirradiation AT paolobadala simulationsoftheultrafastkineticsinnisicternarysystemsunderlaserirradiation AT annabassi simulationsoftheultrafastkineticsinnisicternarysystemsunderlaserirradiation AT ioannisderetzis simulationsoftheultrafastkineticsinnisicternarysystemsunderlaserirradiation AT mariusenachescu simulationsoftheultrafastkineticsinnisicternarysystemsunderlaserirradiation AT giovannifranco simulationsoftheultrafastkineticsinnisicternarysystemsunderlaserirradiation AT giuseppefisicaro simulationsoftheultrafastkineticsinnisicternarysystemsunderlaserirradiation AT patriziavasquez simulationsoftheultrafastkineticsinnisicternarysystemsunderlaserirradiation AT alessandraalberti simulationsoftheultrafastkineticsinnisicternarysystemsunderlaserirradiation AT antoninolamagna simulationsoftheultrafastkineticsinnisicternarysystemsunderlaserirradiation |
_version_ |
1721191807220449280 |