Simulations of the Ultra-Fast Kinetics in Ni-Si-C Ternary Systems under Laser Irradiation

We present a method for the simulation of the kinetic evolution in the sub µs timescale for composite materials containing regions occupied by alloys, compounds, and mixtures belonging to the Ni-Si-C ternary system. Pulsed laser irradiation (pulses of the order of 100 ns) promotes this evolution. Th...

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Main Authors: Salvatore Sanzaro, Corrado Bongiorno, Paolo Badalà, Anna Bassi, Ioannis Deretzis, Marius Enachescu, Giovanni Franco, Giuseppe Fisicaro, Patrizia Vasquez, Alessandra Alberti, Antonino La Magna
Format: Article
Language:English
Published: MDPI AG 2021-08-01
Series:Materials
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Online Access:https://www.mdpi.com/1996-1944/14/16/4769
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spelling doaj-4835db423e8143d5ae75140afd9fc31d2021-08-26T14:01:49ZengMDPI AGMaterials1996-19442021-08-01144769476910.3390/ma14164769Simulations of the Ultra-Fast Kinetics in Ni-Si-C Ternary Systems under Laser IrradiationSalvatore Sanzaro0Corrado Bongiorno1Paolo Badalà2Anna Bassi3Ioannis Deretzis4Marius Enachescu5Giovanni Franco6Giuseppe Fisicaro7Patrizia Vasquez8Alessandra Alberti9Antonino La Magna10CNR-IMM, Zona Industriale Strada VIII 5, 95121 Catania, ItalyCNR-IMM, Zona Industriale Strada VIII 5, 95121 Catania, ItalySTMicroelectronics, Zona Industriale Stradale Primosole 50, 95121 Catania, ItalySTMicroelectronics, Zona Industriale Stradale Primosole 50, 95121 Catania, ItalyCNR-IMM, Zona Industriale Strada VIII 5, 95121 Catania, ItalyCenter for Surface Science and Nanotechnology, University Politehnica of Bucharest, Splaiul Independentei nr. 313, AN031, District 6, 060042 Bucharest, RomaniaSTMicroelectronics, Zona Industriale Stradale Primosole 50, 95121 Catania, ItalyCNR-IMM, Zona Industriale Strada VIII 5, 95121 Catania, ItalySTMicroelectronics, Zona Industriale Stradale Primosole 50, 95121 Catania, ItalyCNR-IMM, Zona Industriale Strada VIII 5, 95121 Catania, ItalyCNR-IMM, Zona Industriale Strada VIII 5, 95121 Catania, ItalyWe present a method for the simulation of the kinetic evolution in the sub µs timescale for composite materials containing regions occupied by alloys, compounds, and mixtures belonging to the Ni-Si-C ternary system. Pulsed laser irradiation (pulses of the order of 100 ns) promotes this evolution. The simulation approach is formulated in the framework of the phase-field theory and it consists of a system of coupled non-linear partial differential equations (PDEs), which considers as variables the following fields: the laser electro-magnetic field, the temperature, the phase-field and the material (Ni, Si, C, C clusters and Ni-silicides) densities. The model integrates a large set of materials and reaction parameters which could also self-consistently depend on the model variables. A parameter calibration is also proposed, specifically suited for the wavelength of a widely used class of excimer lasers (<i>λ</i> = 308 nm). The model is implemented on a proprietary laser annealing technology computer-aided design (TCAD) tool based on the finite element method (FEM). This integration allows, in principle, numerical solutions in systems of any dimension. Here we discuss the complex simulation trend in the one-dimensional case, considering as a starting state, thin films on 4H-SiC substrates, i.e., a configuration reproducing a technologically relevant case study. Simulations as a function of the laser energy density show an articulated scenario, also induced by the variables’ dependency of the materials’ parameters, for the non-melting, partial-melting and full-melting process conditions. The simulation results are validated by post-process experimental analyses of the microstructure and composition of the irradiated samples.https://www.mdpi.com/1996-1944/14/16/4769Ni-Si-C ternary systemlaser annealingfinite element method
collection DOAJ
language English
format Article
sources DOAJ
author Salvatore Sanzaro
Corrado Bongiorno
Paolo Badalà
Anna Bassi
Ioannis Deretzis
Marius Enachescu
Giovanni Franco
Giuseppe Fisicaro
Patrizia Vasquez
Alessandra Alberti
Antonino La Magna
spellingShingle Salvatore Sanzaro
Corrado Bongiorno
Paolo Badalà
Anna Bassi
Ioannis Deretzis
Marius Enachescu
Giovanni Franco
Giuseppe Fisicaro
Patrizia Vasquez
Alessandra Alberti
Antonino La Magna
Simulations of the Ultra-Fast Kinetics in Ni-Si-C Ternary Systems under Laser Irradiation
Materials
Ni-Si-C ternary system
laser annealing
finite element method
author_facet Salvatore Sanzaro
Corrado Bongiorno
Paolo Badalà
Anna Bassi
Ioannis Deretzis
Marius Enachescu
Giovanni Franco
Giuseppe Fisicaro
Patrizia Vasquez
Alessandra Alberti
Antonino La Magna
author_sort Salvatore Sanzaro
title Simulations of the Ultra-Fast Kinetics in Ni-Si-C Ternary Systems under Laser Irradiation
title_short Simulations of the Ultra-Fast Kinetics in Ni-Si-C Ternary Systems under Laser Irradiation
title_full Simulations of the Ultra-Fast Kinetics in Ni-Si-C Ternary Systems under Laser Irradiation
title_fullStr Simulations of the Ultra-Fast Kinetics in Ni-Si-C Ternary Systems under Laser Irradiation
title_full_unstemmed Simulations of the Ultra-Fast Kinetics in Ni-Si-C Ternary Systems under Laser Irradiation
title_sort simulations of the ultra-fast kinetics in ni-si-c ternary systems under laser irradiation
publisher MDPI AG
series Materials
issn 1996-1944
publishDate 2021-08-01
description We present a method for the simulation of the kinetic evolution in the sub µs timescale for composite materials containing regions occupied by alloys, compounds, and mixtures belonging to the Ni-Si-C ternary system. Pulsed laser irradiation (pulses of the order of 100 ns) promotes this evolution. The simulation approach is formulated in the framework of the phase-field theory and it consists of a system of coupled non-linear partial differential equations (PDEs), which considers as variables the following fields: the laser electro-magnetic field, the temperature, the phase-field and the material (Ni, Si, C, C clusters and Ni-silicides) densities. The model integrates a large set of materials and reaction parameters which could also self-consistently depend on the model variables. A parameter calibration is also proposed, specifically suited for the wavelength of a widely used class of excimer lasers (<i>λ</i> = 308 nm). The model is implemented on a proprietary laser annealing technology computer-aided design (TCAD) tool based on the finite element method (FEM). This integration allows, in principle, numerical solutions in systems of any dimension. Here we discuss the complex simulation trend in the one-dimensional case, considering as a starting state, thin films on 4H-SiC substrates, i.e., a configuration reproducing a technologically relevant case study. Simulations as a function of the laser energy density show an articulated scenario, also induced by the variables’ dependency of the materials’ parameters, for the non-melting, partial-melting and full-melting process conditions. The simulation results are validated by post-process experimental analyses of the microstructure and composition of the irradiated samples.
topic Ni-Si-C ternary system
laser annealing
finite element method
url https://www.mdpi.com/1996-1944/14/16/4769
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