Piezoelectric Thick Film Deposition via Powder/Granule Spray in Vacuum: A Review

Piezoelectric Thick Film Deposition via Powder/Granule Spray in Vacuum: A Review

Conventional thin-film processing techniques remain inadequate for obtaining superior dense ceramic thick films. The incompatibility of ceramic films prepared via other methods, such as screen printing, spin coating, and sputtering, is a major obstacle in the fabrication of thick film-based ceramic...

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Bibliographic Details
Main Authors: Deepak Rajaram Patil, Venkateswarlu Annapureddy, J. Kaarthik, Atul Thakre, Jun Akedo, Jungho Ryu
Format: Article
Language:English
Published: MDPI AG 2020-07-01
Series:Actuators
Subjects:
aerosol deposition
granule spray
piezoelectric
ferroelectric
energy harvesting
Online Access:https://www.mdpi.com/2076-0825/9/3/59

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