Three-Dimensional Finite Element Method Simulation of Perforated Graphene Nano-Electro-Mechanical (NEM) Switches

Three-Dimensional Finite Element Method Simulation of Perforated Graphene Nano-Electro-Mechanical (NEM) Switches

The miniaturization trend leads to the development of a graphene based nanoelectromechanical (NEM) switch to fulfill the high demand in low power device applications. In this article, we highlight the finite element (FEM) simulation of the graphene-based NEM switches of fixed-fixed ends design with...

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Bibliographic Details
Main Authors: Mohd Amir Zulkefli, Mohd Ambri Mohamed, Kim S. Siow, Burhanuddin Yeop Majlis, Jothiramalingam Kulothungan, Manoharan Muruganathan, Hiroshi Mizuta
Format: Article
Language:English
Published: MDPI AG 2017-07-01
Series:Micromachines
Subjects:
nanoelectromechanical (NEM) switch
graphene
intact beam structure
perforated beam structure
finite element simulation (FEM)
pull-in voltage characteristic
von Mises stress
Online Access:https://www.mdpi.com/2072-666X/8/8/236

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https://www.mdpi.com/2072-666X/8/8/236

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