A Monolithic High-G SOI-MEMS Accelerometer for Measuring Projectile Launch and Flight Accelerations

A Monolithic High-G SOI-MEMS Accelerometer for Measuring Projectile Launch and Flight Accelerations

Analog Devices (ADI) has designed and fabricated a monolithic high-g acceleration sensor (ADXSTC3-HG) fabricated with the ADI silicon-on-insulator micro-electro-mechanical system (SOI-MEMS) process. The SOI-MEMS sensor structure has a thickness of 10 um, allowing for the design of inertial sensors w...

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Bibliographic Details
Main Authors: Bradford S. Davis, Tim Denison, Jinbo Kuang
Format: Article
Language:English
Published: Hindawi Limited 2006-01-01
Series:Shock and Vibration
Online Access:http://dx.doi.org/10.1155/2006/793564
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spelling doaj-472477fa756541389fc231a50d2c2a212020-11-25T00:37:38ZengHindawi LimitedShock and Vibration1070-96221875-92032006-01-0113212713510.1155/2006/793564A Monolithic High-G SOI-MEMS Accelerometer for Measuring Projectile Launch and Flight AccelerationsBradford S. Davis0Tim Denison1Jinbo Kuang2US Army Research Laboratory, Aberdeen Proving Ground, MD 21005, USAAnalog Devices, Inc., Cambridge, MA 02139, USAAnalog Devices, Inc., Cambridge, MA 02139, USAAnalog Devices (ADI) has designed and fabricated a monolithic high-g acceleration sensor (ADXSTC3-HG) fabricated with the ADI silicon-on-insulator micro-electro-mechanical system (SOI-MEMS) process. The SOI-MEMS sensor structure has a thickness of 10 um, allowing for the design of inertial sensors with excellent cross-axis rejection. The high-g accelerometer discussed in this paper was designed to measure in-plane acceleration to 10,000 g while subjected to 100,000 g in the orthogonal axes. These requirements were intended to meet Army munition applications. The monolithic sensor was packaged in an 8-pin leadless chip carrier (LCC-8) and was successfully demonstrated by the US Army Research Laboratory (ARL) as part of an inertial measurement unit during an instrumented flight experiment of artillery projectiles launched at 15,000 g.http://dx.doi.org/10.1155/2006/793564
collection DOAJ
language English
format Article
sources DOAJ
author Bradford S. Davis
Tim Denison
Jinbo Kuang
spellingShingle Bradford S. Davis
Tim Denison
Jinbo Kuang
A Monolithic High-G SOI-MEMS Accelerometer for Measuring Projectile Launch and Flight Accelerations
Shock and Vibration
author_facet Bradford S. Davis
Tim Denison
Jinbo Kuang
author_sort Bradford S. Davis
title A Monolithic High-G SOI-MEMS Accelerometer for Measuring Projectile Launch and Flight Accelerations
title_short A Monolithic High-G SOI-MEMS Accelerometer for Measuring Projectile Launch and Flight Accelerations
title_full A Monolithic High-G SOI-MEMS Accelerometer for Measuring Projectile Launch and Flight Accelerations
title_fullStr A Monolithic High-G SOI-MEMS Accelerometer for Measuring Projectile Launch and Flight Accelerations
title_full_unstemmed A Monolithic High-G SOI-MEMS Accelerometer for Measuring Projectile Launch and Flight Accelerations
title_sort monolithic high-g soi-mems accelerometer for measuring projectile launch and flight accelerations
publisher Hindawi Limited
series Shock and Vibration
issn 1070-9622
1875-9203
publishDate 2006-01-01
description Analog Devices (ADI) has designed and fabricated a monolithic high-g acceleration sensor (ADXSTC3-HG) fabricated with the ADI silicon-on-insulator micro-electro-mechanical system (SOI-MEMS) process. The SOI-MEMS sensor structure has a thickness of 10 um, allowing for the design of inertial sensors with excellent cross-axis rejection. The high-g accelerometer discussed in this paper was designed to measure in-plane acceleration to 10,000 g while subjected to 100,000 g in the orthogonal axes. These requirements were intended to meet Army munition applications. The monolithic sensor was packaged in an 8-pin leadless chip carrier (LCC-8) and was successfully demonstrated by the US Army Research Laboratory (ARL) as part of an inertial measurement unit during an instrumented flight experiment of artillery projectiles launched at 15,000 g.
url http://dx.doi.org/10.1155/2006/793564
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AT timdenison amonolithichighgsoimemsaccelerometerformeasuringprojectilelaunchandflightaccelerations
AT jinbokuang amonolithichighgsoimemsaccelerometerformeasuringprojectilelaunchandflightaccelerations
AT bradfordsdavis monolithichighgsoimemsaccelerometerformeasuringprojectilelaunchandflightaccelerations
AT timdenison monolithichighgsoimemsaccelerometerformeasuringprojectilelaunchandflightaccelerations
AT jinbokuang monolithichighgsoimemsaccelerometerformeasuringprojectilelaunchandflightaccelerations
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