Microstructure and properties of polycrystalline PZT films obtained by RF magnetron sputtering with fine variation of the composition near morphotropic phase boundary

Microstructure and properties of polycrystalline PZT films obtained by RF magnetron sputtering with fine variation of the composition near morphotropic phase boundary

The article discusses the possibilities of fine composition variation of polycrystalline PZT films at the morphotropic phase boundary. The composition of thin films prepared by RF magnetron sputtering of a ceramic target of stoichiometric composition PbZr0.54Ti0.46O3 was varied by changing the dist...

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Main Authors: Дмитрий Михайлович Долгинцев, Евгений Юрьевич Каптелов, Станислав Викторович Сенкевич, Игорь Петрович Пронин, Владимир Петрович Пронин
Format: Article
Language:English
Published: Herzen State Pedagogical University of Russia 2021-09-01
Series:Physics of Complex Systems
Subjects:
method of fine composition variation
PZT
thin films
morphotropic phase boundary
scanning electron microscopy
Online Access:https://physcomsys.ru/index.php/physcomsys/article/view/62

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