Fabricating Zr-Based Bulk Metallic Glass Microcomponent by Suction Casting Using Silicon Micromold

Fabricating Zr-Based Bulk Metallic Glass Microcomponent by Suction Casting Using Silicon Micromold

A suction casting process for fabricating Zr 55 Cu 30 Al 10 Ni 5 bulk metallic glass microcomponent using silicon micromold has been studied. A complicated BMG microgear with 50 μm in module has been cast successfully. Observed by scanning electron microscopy and laser scanning confocal microscopy,...

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Main Authors: Zhijing Zhu, Chuanyun Yi, Tielin Shi, Yang Gao, Chi Wen, Guanglan Liao
Format: Article
Language:English
Published: SAGE Publishing 2014-08-01
Series:Advances in Mechanical Engineering
Online Access:https://doi.org/10.1155/2014/362484
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spelling doaj-46614319639841e990744d7a603bd18f2020-11-25T03:09:33ZengSAGE PublishingAdvances in Mechanical Engineering1687-81322014-08-01610.1155/2014/36248410.1155_2014/362484Fabricating Zr-Based Bulk Metallic Glass Microcomponent by Suction Casting Using Silicon MicromoldZhijing Zhu0Chuanyun Yi1Tielin Shi2Yang Gao3Chi Wen4Guanglan Liao5 State Key Laboratory of Digital Manufacturing Equipment and Technology, Huazhong University of Science and Technology, Wuhan 430074, China State Key Laboratory of Digital Manufacturing Equipment and Technology, Huazhong University of Science and Technology, Wuhan 430074, China State Key Laboratory of Digital Manufacturing Equipment and Technology, Huazhong University of Science and Technology, Wuhan 430074, China Jiangxi Province Key Laboratory of Numerical Control Technology & Application, Jiujiang, Jiangxi 332005, China State Key Laboratory of Digital Manufacturing Equipment and Technology, Huazhong University of Science and Technology, Wuhan 430074, China State Key Laboratory of Digital Manufacturing Equipment and Technology, Huazhong University of Science and Technology, Wuhan 430074, ChinaA suction casting process for fabricating Zr 55 Cu 30 Al 10 Ni 5 bulk metallic glass microcomponent using silicon micromold has been studied. A complicated BMG microgear with 50 μm in module has been cast successfully. Observed by scanning electron microscopy and laser scanning confocal microscopy, we find that the cast microgear duplicates the silicon micromold including the microstructure on the surface. The amorphous state of the microgear is confirmed by transmission election microscopy. The nanoindentation hardness and elasticity modulus of the microgear reach 6.5 GPa and 94.5 GPa. The simulation and experimental results prove that the suction casting process with the silicon micromold is a promising one-step method to fabricate bulk metallic glass microcomponents with high performance for applications in microelectromechanical system.https://doi.org/10.1155/2014/362484
collection DOAJ
language English
format Article
sources DOAJ
author Zhijing Zhu
Chuanyun Yi
Tielin Shi
Yang Gao
Chi Wen
Guanglan Liao
spellingShingle Zhijing Zhu
Chuanyun Yi
Tielin Shi
Yang Gao
Chi Wen
Guanglan Liao
Fabricating Zr-Based Bulk Metallic Glass Microcomponent by Suction Casting Using Silicon Micromold
Advances in Mechanical Engineering
author_facet Zhijing Zhu
Chuanyun Yi
Tielin Shi
Yang Gao
Chi Wen
Guanglan Liao
author_sort Zhijing Zhu
title Fabricating Zr-Based Bulk Metallic Glass Microcomponent by Suction Casting Using Silicon Micromold
title_short Fabricating Zr-Based Bulk Metallic Glass Microcomponent by Suction Casting Using Silicon Micromold
title_full Fabricating Zr-Based Bulk Metallic Glass Microcomponent by Suction Casting Using Silicon Micromold
title_fullStr Fabricating Zr-Based Bulk Metallic Glass Microcomponent by Suction Casting Using Silicon Micromold
title_full_unstemmed Fabricating Zr-Based Bulk Metallic Glass Microcomponent by Suction Casting Using Silicon Micromold
title_sort fabricating zr-based bulk metallic glass microcomponent by suction casting using silicon micromold
publisher SAGE Publishing
series Advances in Mechanical Engineering
issn 1687-8132
publishDate 2014-08-01
description A suction casting process for fabricating Zr 55 Cu 30 Al 10 Ni 5 bulk metallic glass microcomponent using silicon micromold has been studied. A complicated BMG microgear with 50 μm in module has been cast successfully. Observed by scanning electron microscopy and laser scanning confocal microscopy, we find that the cast microgear duplicates the silicon micromold including the microstructure on the surface. The amorphous state of the microgear is confirmed by transmission election microscopy. The nanoindentation hardness and elasticity modulus of the microgear reach 6.5 GPa and 94.5 GPa. The simulation and experimental results prove that the suction casting process with the silicon micromold is a promising one-step method to fabricate bulk metallic glass microcomponents with high performance for applications in microelectromechanical system.
url https://doi.org/10.1155/2014/362484
work_keys_str_mv AT zhijingzhu fabricatingzrbasedbulkmetallicglassmicrocomponentbysuctioncastingusingsiliconmicromold
AT chuanyunyi fabricatingzrbasedbulkmetallicglassmicrocomponentbysuctioncastingusingsiliconmicromold
AT tielinshi fabricatingzrbasedbulkmetallicglassmicrocomponentbysuctioncastingusingsiliconmicromold
AT yanggao fabricatingzrbasedbulkmetallicglassmicrocomponentbysuctioncastingusingsiliconmicromold
AT chiwen fabricatingzrbasedbulkmetallicglassmicrocomponentbysuctioncastingusingsiliconmicromold
AT guanglanliao fabricatingzrbasedbulkmetallicglassmicrocomponentbysuctioncastingusingsiliconmicromold
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