Investigation of the Pull-in Phenomenon in Drug Delivery Micropump Using Galerkin Method
In this paper, the pull-in phenomenon of an electrostatically actuated circular micropump which is used in drug delivery systems was investigated. The “pull-in” or divergence instability in electrostatically actuated micro electromechanical systems presents a ubiquitous challenge in MEMS technology...
| Main Authors: | , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
IFSA Publishing, S.L.
2007-04-01
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| Series: | Sensors & Transducers |
| Subjects: | |
| Online Access: | http://www.sensorsportal.com/HTML/DIGEST/april_07/P_134.pdf |