A Parallel-Plate-Based Fishbone-Shape MEMS Tunable Capacitor with Linear Capacitance-Voltage Response
Conventional designs for MEMS parallel-plate tunable capacitors suggest the use of rectangular electrodes and linear structural stiffness which have two drawbacks; low tunability (up to 50 %) and nonlinear capacitance-voltage (C-V) response. This paper presents a novel fishbone-shape parallel-plate...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IFSA Publishing, S.L.
2009-10-01
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| Series: | Sensors & Transducers |
| Subjects: | |
| Online Access: | http://www.sensorsportal.com/HTML/DIGEST/october_09/P_SI_80.pdf |