Compensation Method for Polarization Mixing in the Homodyne Interferometer
A homodyne interferometer is one of the most important tools in nanometre measurements. However, its nonlinear error seriously affects measurement accuracy at the sub-nanometre level. As one of the dominant factors that cause nonlinear error in a homodyne interferometer with a quadrature detector sy...
| Main Authors: | , , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2020-09-01
|
| Series: | Applied Sciences |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2076-3417/10/17/6060 |