Phase Noise Reduction in a VHF MEMS-CMOS Oscillator Using Phononic Crystals

Phase Noise Reduction in a VHF MEMS-CMOS Oscillator Using Phononic Crystals

This paper presents experimental results showing reduced phase noise in a very high frequency band microelectromechanical systems (MEMS) oscillator. This has been achieved by engineering the embedded MEMS resonator with phononic crystal structures. The aluminum nitride on silicon MEMS resonator with...

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Bibliographic Details
Main Authors: Pei Qin, Haoshen Zhu, Joshua E.-Y. Lee, Quan Xue
Format: Article
Language:English
Published: IEEE 2016-01-01
Series:IEEE Journal of the Electron Devices Society
Subjects:
Microelectromechanical Systems (MEMS),
oscillator
quality factor
phase noise
phononic crystal
Online Access:https://ieeexplore.ieee.org/document/7400895/

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