CONTROL OF RESIDUAL STRESSES IN STRUCTURES SI-SIO<sub>2</sub>
The consideration is made of the ways leading to increasing the control of residual stresses in structures such as silicon dioxide-monocrystal silicon substrate. The results concerning the determination of the level of residual stresses in structures Si-SiO2 are presented.
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| Format: | Article |
| Language: | Russian |
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Educational institution «Belarusian State University of Informatics and Radioelectronics»
2019-06-01
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| Series: | Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki |
| Online Access: | https://doklady.bsuir.by/jour/article/view/121 |
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doaj-440b6f4871e94f51845b9f3674143bb6 |
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Article |
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doaj-440b6f4871e94f51845b9f3674143bb62021-07-28T16:19:45ZrusEducational institution «Belarusian State University of Informatics and Radioelectronics»Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki1729-76482019-06-01083743120CONTROL OF RESIDUAL STRESSES IN STRUCTURES SI-SIO<sub>2</sub>V. A. Zelenin0Физико-технический институт НАН БеларусиThe consideration is made of the ways leading to increasing the control of residual stresses in structures such as silicon dioxide-monocrystal silicon substrate. The results concerning the determination of the level of residual stresses in structures Si-SiO2 are presented.https://doklady.bsuir.by/jour/article/view/121 |
| collection |
DOAJ |
| language |
Russian |
| format |
Article |
| sources |
DOAJ |
| author |
V. A. Zelenin |
| spellingShingle |
V. A. Zelenin CONTROL OF RESIDUAL STRESSES IN STRUCTURES SI-SIO<sub>2</sub> Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki |
| author_facet |
V. A. Zelenin |
| author_sort |
V. A. Zelenin |
| title |
CONTROL OF RESIDUAL STRESSES IN STRUCTURES SI-SIO<sub>2</sub> |
| title_short |
CONTROL OF RESIDUAL STRESSES IN STRUCTURES SI-SIO<sub>2</sub> |
| title_full |
CONTROL OF RESIDUAL STRESSES IN STRUCTURES SI-SIO<sub>2</sub> |
| title_fullStr |
CONTROL OF RESIDUAL STRESSES IN STRUCTURES SI-SIO<sub>2</sub> |
| title_full_unstemmed |
CONTROL OF RESIDUAL STRESSES IN STRUCTURES SI-SIO<sub>2</sub> |
| title_sort |
control of residual stresses in structures si-sio<sub>2</sub> |
| publisher |
Educational institution «Belarusian State University of Informatics and Radioelectronics» |
| series |
Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki |
| issn |
1729-7648 |
| publishDate |
2019-06-01 |
| description |
The consideration is made of the ways leading to increasing the control of residual stresses in structures such as silicon dioxide-monocrystal silicon substrate. The results concerning the determination of the level of residual stresses in structures Si-SiO2 are presented. |
| url |
https://doklady.bsuir.by/jour/article/view/121 |
| work_keys_str_mv |
AT vazelenin controlofresidualstressesinstructuressisiosub2sub |
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1721268051648708608 |