Resistive Switching Characteristics of a SiOx Layer with CF4 Plasma Treatment

Bibliographic Details
Main Authors: Chih-Yi Liu, Yueh-Ying Tsai, Wen-Tsung Fang, Hung-Yu Wang
Format: Article
Language:English
Published: Hindawi Limited 2014-01-01
Series:Journal of Nanomaterials
Online Access:http://dx.doi.org/10.1155/2014/703463