Heat Treatment Effect on Magnetic Microstructure of Fe73.9Cu1Nb3Si13.2B8.9 Thin Films

Fe73.9Cu1Nb3Si13.2B8.9 (Finemet) thin films were deposited on the glass substrates by means of radio frequency sputtering. The films thickness was varied from 10 to 200 nm. Heat treatment at temperatures of 350, 400 and 450 °C were performed for 30 minutes in order to control thin film structural st...

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Bibliographic Details
Main Authors: Mikhalitsyna Evgeniya, Zakharchuk Ivan, Soboleva Ekaterina, Geydt Pavel, Kataev Vasiliy, Lepalovskij Vladimir, Lähderanta Erkki
Format: Article
Language:English
Published: EDP Sciences 2018-01-01
Series:EPJ Web of Conferences
Online Access:https://doi.org/10.1051/epjconf/201818504001