Phase-shift mask fabrication at micrometric scale by ion-exchange in glass for astronomical wavefront sensors

Photolithography combined with ion-exchange in glass is a well-known technology that can be applied to develop many different optical devices. In this work, we present the complete procedure to generate small circular phase-shift masks with diameters of only a few microns and high control in the pha...

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Main Authors:	Prieto-Blanco Xesús, Montero-Orille Carlos, González-Núñez Héctor, Moreno Vicente, Cagigal Manuel P., Liñares Jesús
Format:	Article
Language:	English
Published:	EDP Sciences 2020-01-01
Series:	EPJ Web of Conferences
Online Access:	https://www.epj-conferences.org/articles/epjconf/pdf/2020/14/epjconf_eosam2020_02004.pdf

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spelling	doaj-42ece20775734d6f901ba3d854dc95962021-08-02T10:24:32ZengEDP SciencesEPJ Web of Conferences2100-014X2020-01-012380200410.1051/epjconf/202023802004epjconf_eosam2020_02004Phase-shift mask fabrication at micrometric scale by ion-exchange in glass for astronomical wavefront sensorsPrieto-Blanco Xesús0Montero-Orille Carlos1González-Núñez Héctor2Moreno Vicente3Cagigal Manuel P.4Liñares Jesús5Quantum Materials and Photonics Group, Department of Applied Physics, Faculty of Physics / Faculty of Optics and Optometry, University of Santiago de Compostela, Campus Vida s/nQuantum Materials and Photonics Group, Department of Applied Physics, Faculty of Physics / Faculty of Optics and Optometry, University of Santiago de Compostela, Campus Vida s/nQuantum Materials and Photonics Group, Department of Applied Physics, Faculty of Physics / Faculty of Optics and Optometry, University of Santiago de Compostela, Campus Vida s/nQuantum Materials and Photonics Group, Department of Applied Physics, Faculty of Physics / Faculty of Optics and Optometry, University of Santiago de Compostela, Campus Vida s/nDepartment of Applied Physics, University of CantabriaQuantum Materials and Photonics Group, Department of Applied Physics, Faculty of Physics / Faculty of Optics and Optometry, University of Santiago de Compostela, Campus Vida s/nPhotolithography combined with ion-exchange in glass is a well-known technology that can be applied to develop many different optical devices. In this work, we present the complete procedure to generate small circular phase-shift masks with diameters of only a few microns and high control in the phase change produced. It is a strategic element in applications such as optical astronomy.https://www.epj-conferences.org/articles/epjconf/pdf/2020/14/epjconf_eosam2020_02004.pdf
collection	DOAJ
language	English
format	Article
sources	DOAJ
author	Prieto-Blanco Xesús Montero-Orille Carlos González-Núñez Héctor Moreno Vicente Cagigal Manuel P. Liñares Jesús
spellingShingle	Prieto-Blanco Xesús Montero-Orille Carlos González-Núñez Héctor Moreno Vicente Cagigal Manuel P. Liñares Jesús Phase-shift mask fabrication at micrometric scale by ion-exchange in glass for astronomical wavefront sensors EPJ Web of Conferences
author_facet	Prieto-Blanco Xesús Montero-Orille Carlos González-Núñez Héctor Moreno Vicente Cagigal Manuel P. Liñares Jesús
author_sort	Prieto-Blanco Xesús
title	Phase-shift mask fabrication at micrometric scale by ion-exchange in glass for astronomical wavefront sensors
title_short	Phase-shift mask fabrication at micrometric scale by ion-exchange in glass for astronomical wavefront sensors
title_full	Phase-shift mask fabrication at micrometric scale by ion-exchange in glass for astronomical wavefront sensors
title_fullStr	Phase-shift mask fabrication at micrometric scale by ion-exchange in glass for astronomical wavefront sensors
title_full_unstemmed	Phase-shift mask fabrication at micrometric scale by ion-exchange in glass for astronomical wavefront sensors
title_sort	phase-shift mask fabrication at micrometric scale by ion-exchange in glass for astronomical wavefront sensors
publisher	EDP Sciences
series	EPJ Web of Conferences
issn	2100-014X
publishDate	2020-01-01
description	Photolithography combined with ion-exchange in glass is a well-known technology that can be applied to develop many different optical devices. In this work, we present the complete procedure to generate small circular phase-shift masks with diameters of only a few microns and high control in the phase change produced. It is a strategic element in applications such as optical astronomy.
url	https://www.epj-conferences.org/articles/epjconf/pdf/2020/14/epjconf_eosam2020_02004.pdf
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Phase-shift mask fabrication at micrometric scale by ion-exchange in glass for astronomical wavefront sensors

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