Measurement of relative permittivity of LTCC ceramic at different temperatures

Devices based on LTCC (low-temperature co-fired ceramic) technology are more widely applied in high temperature environments, and the temperature-dependent properties of the LTCC material play an important role in measurements of the characteristics of these devices at high temperature. In this pape...

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Main Authors: Qiulin Tan, Hao Kang, Li Qin, Jijun Xiong, Zhaoying Zhou, Wendong Zhang, Tao Luo, Chenyang Xue, Jun Liu
Format: Article
Language:English
Published: AIP Publishing LLC 2014-02-01
Series:AIP Advances
Online Access:http://dx.doi.org/10.1063/1.4867246
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spelling doaj-42a6b29918284c5189d368393d9f3ab62020-11-25T00:15:59ZengAIP Publishing LLCAIP Advances2158-32262014-02-0143031316031316-610.1063/1.4867246016493ADVMeasurement of relative permittivity of LTCC ceramic at different temperaturesQiulin Tan0Hao Kang1Li Qin2Jijun Xiong3Zhaoying Zhou4Wendong Zhang5Tao Luo6Chenyang Xue7Jun Liu8Key Laboratory of Instrumentation Science & Dynamic Measurement (North University of China), Ministry of Education, North University of China, Tai Yuan, 030051, ChinaKey Laboratory of Instrumentation Science & Dynamic Measurement (North University of China), Ministry of Education, North University of China, Tai Yuan, 030051, ChinaKey Laboratory of Instrumentation Science & Dynamic Measurement (North University of China), Ministry of Education, North University of China, Tai Yuan, 030051, ChinaKey Laboratory of Instrumentation Science & Dynamic Measurement (North University of China), Ministry of Education, North University of China, Tai Yuan, 030051, ChinaDepartment of Precision Instrument, Tsinghua University, Beijing,100084, ChinaKey Laboratory of Instrumentation Science & Dynamic Measurement (North University of China), Ministry of Education, North University of China, Tai Yuan, 030051, ChinaKey Laboratory of Instrumentation Science & Dynamic Measurement (North University of China), Ministry of Education, North University of China, Tai Yuan, 030051, ChinaKey Laboratory of Instrumentation Science & Dynamic Measurement (North University of China), Ministry of Education, North University of China, Tai Yuan, 030051, ChinaKey Laboratory of Instrumentation Science & Dynamic Measurement (North University of China), Ministry of Education, North University of China, Tai Yuan, 030051, ChinaDevices based on LTCC (low-temperature co-fired ceramic) technology are more widely applied in high temperature environments, and the temperature-dependent properties of the LTCC material play an important role in measurements of the characteristics of these devices at high temperature. In this paper, the temperature-dependence of the relative permittivity of DuPont 951 LTCC ceramic is studied from room temperature to 500 °C. An expression for relative permittivity is obtained, which relates the relative permittivity to the resonant frequency, inductance, parasitic capacitance and electrode capacitance of the LTCC sample. Of these properties, the electrode capacitance is the most strongly temperature-dependent. The LTCC sample resonant frequency, inductance and parasitic capacitance were measured (from room temperature to 500 °C) with a high temperature measurement system comprising a muffle furnace and network analyzer. We found that the resonant frequency reduced and the inductance and parasitic capacitance increased slightly as the temperature increases. The relative permittivity can be calculated from experimental frequency, inductance and parasitic capacitance measurements. Calculating results show that the relative permittivity of DuPont 951 LTCC ceramic ceramic increases to 8.21 from room temperature to 500 °C.http://dx.doi.org/10.1063/1.4867246
collection DOAJ
language English
format Article
sources DOAJ
author Qiulin Tan
Hao Kang
Li Qin
Jijun Xiong
Zhaoying Zhou
Wendong Zhang
Tao Luo
Chenyang Xue
Jun Liu
spellingShingle Qiulin Tan
Hao Kang
Li Qin
Jijun Xiong
Zhaoying Zhou
Wendong Zhang
Tao Luo
Chenyang Xue
Jun Liu
Measurement of relative permittivity of LTCC ceramic at different temperatures
AIP Advances
author_facet Qiulin Tan
Hao Kang
Li Qin
Jijun Xiong
Zhaoying Zhou
Wendong Zhang
Tao Luo
Chenyang Xue
Jun Liu
author_sort Qiulin Tan
title Measurement of relative permittivity of LTCC ceramic at different temperatures
title_short Measurement of relative permittivity of LTCC ceramic at different temperatures
title_full Measurement of relative permittivity of LTCC ceramic at different temperatures
title_fullStr Measurement of relative permittivity of LTCC ceramic at different temperatures
title_full_unstemmed Measurement of relative permittivity of LTCC ceramic at different temperatures
title_sort measurement of relative permittivity of ltcc ceramic at different temperatures
publisher AIP Publishing LLC
series AIP Advances
issn 2158-3226
publishDate 2014-02-01
description Devices based on LTCC (low-temperature co-fired ceramic) technology are more widely applied in high temperature environments, and the temperature-dependent properties of the LTCC material play an important role in measurements of the characteristics of these devices at high temperature. In this paper, the temperature-dependence of the relative permittivity of DuPont 951 LTCC ceramic is studied from room temperature to 500 °C. An expression for relative permittivity is obtained, which relates the relative permittivity to the resonant frequency, inductance, parasitic capacitance and electrode capacitance of the LTCC sample. Of these properties, the electrode capacitance is the most strongly temperature-dependent. The LTCC sample resonant frequency, inductance and parasitic capacitance were measured (from room temperature to 500 °C) with a high temperature measurement system comprising a muffle furnace and network analyzer. We found that the resonant frequency reduced and the inductance and parasitic capacitance increased slightly as the temperature increases. The relative permittivity can be calculated from experimental frequency, inductance and parasitic capacitance measurements. Calculating results show that the relative permittivity of DuPont 951 LTCC ceramic ceramic increases to 8.21 from room temperature to 500 °C.
url http://dx.doi.org/10.1063/1.4867246
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