Liquid Level Sensing using Planar Inter-digitated Electrodes Employing CMOS Process

Liquid Level Sensing using Planar Inter-digitated Electrodes Employing CMOS Process

This article details liquid level sensing utilizing interdigitated electrodes topology fabricated using CMOS process steps. Layer of silicon strip with multiple electrodes is employed for characterization of different liquids based on the principle of capacitance change and thereby relative dielectr...

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Bibliographic Details
Main Authors: B. N. BALIGA, Kamaljeet SINGH, V. Kavitha, Navneet VERMA, M. M. NAYAK, K. Nagachenchaiah, V. K. Lakshmeesha
Format: Article
Language:English
Published: IFSA Publishing, S.L. 2015-03-01
Series:Sensors & Transducers
Subjects:
Inter-digital topology
Liquid level sensor
CMOS process
silicon substrate.
Online Access:http://www.sensorsportal.com/HTML/DIGEST/march_2015/Vol_186/P_2626.pdf

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