FIB Secondary Etching Method for Fabrication of Fine CNT Forest Metamaterials

FIB Secondary Etching Method for Fabrication of Fine CNT Forest Metamaterials

Abstract Anisotropic materials, like carbon nanotubes (CNTs), are the perfect substitutes to overcome the limitations of conventional metamaterials; however, the successful fabrication of CNT forest metamaterial structures is still very challenging. In this study, a new method utilizing a focused io...

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Bibliographic Details
Main Authors: Adam Pander, Akimitsu Hatta, Hiroshi Furuta
Format: Article
Language:English
Published: SpringerOpen 2017-04-01
Series:Nano-Micro Letters
Subjects:
Carbon nanotubes
Metamaterial
FIB patterning
Secondary etching method
Chemical vapor deposition
Online Access:http://link.springer.com/article/10.1007/s40820-017-0145-5

Internet

http://link.springer.com/article/10.1007/s40820-017-0145-5

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