Research status in ultra-precision machining of silicon carbide parts by oxidation-assisted polishing
Oxidation-assisted polishing is an important machining method for obtaining SiC parts with high precision. Through plasma oxidation, thermal oxidation, and anodic oxidation, soft oxide can be obtained on the RS-SiC substrate. With the assistance of abrasive polishing to remove the oxide rapidly, the...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | zho |
| Published: |
Hebei University of Science and Technology
2016-10-01
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| Series: | Journal of Hebei University of Science and Technology |
| Subjects: | |
| Online Access: | http://xuebao.hebust.edu.cn/hbkjdx/ch/reader/create_pdf.aspx?file_no=b201605002&flag=1&journal_ |