Growth Mechanisms and the Effects of Deposition Parameters on the Structure and Properties of High Entropy Film by Magnetron Sputtering

Growth Mechanisms and the Effects of Deposition Parameters on the Structure and Properties of High Entropy Film by Magnetron Sputtering

Despite intense research on high entropy films, the mechanism of film growth and the influence of key factors remain incompletely understood. In this study, high entropy films consisting of five elements (FeCoNiCrAl) with columnar and nanometer-scale grains were prepared by magnetron sputtering. The...

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Bibliographic Details
Main Authors: Yanxia Liang, Peipei Wang, Yufei Wang, Yijia Dai, Zhaoyi Hu, Denis E. Tranca, Radu Hristu, Stefan G. Stanciu, Antonela Toma, George A. Stanciu, Xingjun Wang, Engang Fu
Format: Article
Language:English
Published: MDPI AG 2019-09-01
Series:Materials
Subjects:
high entropy film
nanocrystal
deposition mechanism
magnetron sputtering
Online Access:https://www.mdpi.com/1996-1944/12/18/3008

Internet

https://www.mdpi.com/1996-1944/12/18/3008

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