A Coupled Field Multiphysics Modeling Approach to Investigate RF MEMS Switch Failure Modes under Various Operational Conditions
In this paper, the reliability of capacitive shunt RF MEMS switches have been investigated using three dimensional (3D) coupled multiphysics finite element (FE) analysis. The coupled field analysis involved three consecutive multiphysics interactions. The first interaction is characterized as a two-...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2009-10-01
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| Series: | Sensors |
| Subjects: | |
| Online Access: | http://www.mdpi.com/1424-8220/9/10/7988/ |