A Coupled Field Multiphysics Modeling Approach to Investigate RF MEMS Switch Failure Modes under Various Operational Conditions

A Coupled Field Multiphysics Modeling Approach to Investigate RF MEMS Switch Failure Modes under Various Operational Conditions

In this paper, the reliability of capacitive shunt RF MEMS switches have been investigated using three dimensional (3D) coupled multiphysics finite element (FE) analysis. The coupled field analysis involved three consecutive multiphysics interactions. The first interaction is characterized as a two-...

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Bibliographic Details
Main Authors: Khaled Sadek, Jonathan Lueke, Walied Moussa
Format: Article
Language:English
Published: MDPI AG 2009-10-01
Series:Sensors
Subjects:
RF MEMS switch
substructuring
skin effect
buckling
residual stresses
Online Access:http://www.mdpi.com/1424-8220/9/10/7988/

Internet

http://www.mdpi.com/1424-8220/9/10/7988/

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