Silicon nanocrystals embedded in oxide films grown by magnetron sputtering

Silicon nanocrystals embedded in oxide films grown by magnetron sputtering

This paper presents a comparison of the results that we obtained and reported over the last few years on the structural, optical and light emitting properties of Si-SiO<sub>2</sub> and Si-Al<sub>2</sub>O<sub>3</sub> films that were fabricated using a specific conf...

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Bibliographic Details
Main Authors: Caroline Bonafos, Vincent Paillard, Jedrzej Jedrzejewski, Isaac Balberg, Larysa Khomenkova, Mykola Baran, Yevgen Venger, Nadiia Korsunska
Format: Article
Language:English
Published: AIMS Press 2016-05-01
Series:AIMS Materials Science
Subjects:
Si nanocrystals
SiO<sub>2</sub>
Al<sub>2</sub>O<sub>3</sub>
luminescence
defects
Online Access:http://www.aimspress.com/Materials/article/767/fulltext.html

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http://www.aimspress.com/Materials/article/767/fulltext.html

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