Study of Lapping and Polishing Performance on Lithium Niobate Single Crystals

Study of Lapping and Polishing Performance on Lithium Niobate Single Crystals

Recently, the range of crystal materials used in industrial microelectronics has significantly increased. Lithium niobate single crystals are most often used in integrated optics, due to the high values of optical and electro-optical coefficients. An integral-optical circuit based on a lithium nioba...

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Bibliographic Details
Main Authors: Karim Ravilevich Muratov, Timur Rizovich Ablyaz, Evgeny Anatolevich Gashev, Sarabjeet Singh Sidhu, Evgeny Sergeevich Shlykov
Format: Article
Language:English
Published: MDPI AG 2021-08-01
Series:Materials
Subjects:
lithium niobate single crystal
abrasive lapping
polishing
surface roughness
deformed layer
tool wear
Online Access:https://www.mdpi.com/1996-1944/14/17/4968

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