High Gauge Factor Piezoresistors Using Aluminium Induced Crystallisation of Silicon at Low Thermal Budget

High Gauge Factor Piezoresistors Using Aluminium Induced Crystallisation of Silicon at Low Thermal Budget

This paper reports on polysilicon piezo-resistors that are fabricated at a low thermal budget using aluminium-induced-crystallization (AIC) of ultra-high-vacuum e-beam evaporated silicon films. By in-situ phosphorus doping of precursor amorphous silicon films e-beam evaporated at room temperature on...

Full description

Bibliographic Details
Main Authors: Ian Chuang, Aron Michael, Chee Yee Kwok
Format: Article
Language:English
Published: MDPI AG 2017-09-01
Series:Proceedings
Subjects:
AIC polysilicon
piezo-resistor
low thermal budget
gauge factor
Online Access:https://www.mdpi.com/2504-3900/1/4/354

Internet

https://www.mdpi.com/2504-3900/1/4/354

Similar Items