Process Yield Index and Variable Sampling Plans for Autocorrelation Between Nonlinear Profiles
In this paper, a process yield-index for autocorrelation between nonlinear profiles is proposed. Applying a one-dimensional Taylor series expansion, the mean and variance of the estimator of the yield index are derived. To evaluate the performance of the proposed yield index a simulation study is co...
| Main Author: | |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
IEEE
2019-01-01
|
| Series: | IEEE Access |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/8590710/ |