Microfabricated Thin Film Impedance Sensor & AC Impedance Measurements

Microfabricated Thin Film Impedance Sensor & AC Impedance Measurements

Thin film microfabrication technique was employed to fabricate a platinum based parallel-electrode structured impedance sensor. Electrochemical impedance spectroscopy (EIS) and equivalent circuit analysis of the small amplitude (±5 mV) AC impedance measurements (frequency range: 1 MHz to 0.1 Hz) at...

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Bibliographic Details
Main Authors:	Jinsong Yu, Chung-Chiun Liu
Format:	Article
Language:	English
Published:	MDPI AG 2010-06-01
Series:	Sensors
Subjects:	microfabrication thin film impedance sensor AC impedance Electrochemical Impedance Spectroscopy (EIS) bulk conductivity
Online Access:	http://www.mdpi.com/1424-8220/10/6/5845/

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