High-Precision Propagation-Loss Measurement of Single-Mode Optical Waveguides on Lithium Niobate on Insulator

High-Precision Propagation-Loss Measurement of Single-Mode Optical Waveguides on Lithium Niobate on Insulator

We demonstrate the fabrication of single-mode optical waveguides on lithium niobate on an insulator (LNOI) by optical patterning combined with chemomechanical polishing. The fabricated LNOI waveguides had a nearly symmetric mode profile of ~2.5 µm mode field size (full-width at half-maximum...

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Bibliographic Details
Main Authors: Jintian Lin, Junxia Zhou, Rongbo Wu, Min Wang, Zhiwei Fang, Wei Chu, Jianhao Zhang, Lingling Qiao, Ya Cheng
Format: Article
Language:English
Published: MDPI AG 2019-09-01
Series:Micromachines
Subjects:
lithium niobate
waveguide
photonic integrated circuit
optical lithography
chemomechanical polish
Online Access:https://www.mdpi.com/2072-666X/10/9/612
Description
Summary:We demonstrate the fabrication of single-mode optical waveguides on lithium niobate on an insulator (LNOI) by optical patterning combined with chemomechanical polishing. The fabricated LNOI waveguides had a nearly symmetric mode profile of ~2.5 µm mode field size (full-width at half-maximum). We developed a high-precision measurement approach by which single-mode waveguides were characterized to have propagation loss of ~0.042 dB/cm.
ISSN:2072-666X

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