Express in-situ measurement of single crystal diamond growth/etching rate in microwave plasma: how to perform multiparametric kinetics study in one working day

Express in-situ measurement of single crystal diamond growth/etching rate in microwave plasma: how to perform multiparametric kinetics study in one working day

Bibliographic Details
Main Authors: Ralchenko V.G., Yurov V.Yu., Bushuev E.V., Bolshakov A.P., Ashkinazi E.E., Antonova I.A., Zavedeev E.V., Khomich A.A., Konov V.I.
Format: Article
Language:English
Published: EDP Sciences 2017-01-01
Series:EPJ Web of Conferences
Online Access:https://doi.org/10.1051/epjconf/201714902001

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