Express in-situ measurement of single crystal diamond growth/etching rate in microwave plasma: how to perform multiparametric kinetics study in one working day

Express in-situ measurement of single crystal diamond growth/etching rate in microwave plasma: how to perform multiparametric kinetics study in one working day

Bibliographic Details
Main Authors: Ralchenko V.G., Yurov V.Yu., Bushuev E.V., Bolshakov A.P., Ashkinazi E.E., Antonova I.A., Zavedeev E.V., Khomich A.A., Konov V.I.
Format: Article
Language:English
Published: EDP Sciences 2017-01-01
Series:EPJ Web of Conferences
Online Access:https://doi.org/10.1051/epjconf/201714902001
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spelling doaj-38ea8f07291a4217bfc8baa955ee00d62021-08-02T13:41:00ZengEDP SciencesEPJ Web of Conferences2100-014X2017-01-011490200110.1051/epjconf/201714902001epjconf_smp2017_02001Express in-situ measurement of single crystal diamond growth/etching rate in microwave plasma: how to perform multiparametric kinetics study in one working dayRalchenko V.G.Yurov V.Yu.Bushuev E.V.0Bolshakov A.P.Ashkinazi E.E.Antonova I.A.Zavedeev E.V.1Khomich A.A.Konov V.I.General Physics Institute RASGeneral Physics Institute RAShttps://doi.org/10.1051/epjconf/201714902001
collection DOAJ
language English
format Article
sources DOAJ
author Ralchenko V.G.
Yurov V.Yu.
Bushuev E.V.
Bolshakov A.P.
Ashkinazi E.E.
Antonova I.A.
Zavedeev E.V.
Khomich A.A.
Konov V.I.
spellingShingle Ralchenko V.G.
Yurov V.Yu.
Bushuev E.V.
Bolshakov A.P.
Ashkinazi E.E.
Antonova I.A.
Zavedeev E.V.
Khomich A.A.
Konov V.I.
Express in-situ measurement of single crystal diamond growth/etching rate in microwave plasma: how to perform multiparametric kinetics study in one working day
EPJ Web of Conferences
author_facet Ralchenko V.G.
Yurov V.Yu.
Bushuev E.V.
Bolshakov A.P.
Ashkinazi E.E.
Antonova I.A.
Zavedeev E.V.
Khomich A.A.
Konov V.I.
author_sort Ralchenko V.G.
title Express in-situ measurement of single crystal diamond growth/etching rate in microwave plasma: how to perform multiparametric kinetics study in one working day
title_short Express in-situ measurement of single crystal diamond growth/etching rate in microwave plasma: how to perform multiparametric kinetics study in one working day
title_full Express in-situ measurement of single crystal diamond growth/etching rate in microwave plasma: how to perform multiparametric kinetics study in one working day
title_fullStr Express in-situ measurement of single crystal diamond growth/etching rate in microwave plasma: how to perform multiparametric kinetics study in one working day
title_full_unstemmed Express in-situ measurement of single crystal diamond growth/etching rate in microwave plasma: how to perform multiparametric kinetics study in one working day
title_sort express in-situ measurement of single crystal diamond growth/etching rate in microwave plasma: how to perform multiparametric kinetics study in one working day
publisher EDP Sciences
series EPJ Web of Conferences
issn 2100-014X
publishDate 2017-01-01
url https://doi.org/10.1051/epjconf/201714902001
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