Express in-situ measurement of single crystal diamond growth/etching rate in microwave plasma: how to perform multiparametric kinetics study in one working day
| Main Authors: | , , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
EDP Sciences
2017-01-01
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| Series: | EPJ Web of Conferences |
| Online Access: | https://doi.org/10.1051/epjconf/201714902001 |
| ISSN: | 2100-014X |
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