Investigation of Electrochemical Oxidation Behaviors and Mechanism of Single-Crystal Silicon (100) Wafer under Potentiostatic Mode

Investigation of Electrochemical Oxidation Behaviors and Mechanism of Single-Crystal Silicon (100) Wafer under Potentiostatic Mode

Electrochemical oxidation (ECO) has been used widely to oxidize single crystal Si wafers. Aiming at optimizing the ECO assisted machining methods, the oxidation behaviors of single- crystal silicon (100) wafer under potentiostatic mode are experimentally investigated. It is shown that the Si wafer c...

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Bibliographic Details
Main Authors: Weijia Guo, Senthil Kumar Anantharajan, Kui Liu, Hui Deng
Format: Article
Language:English
Published: MDPI AG 2020-06-01
Series:Coatings
Subjects:
silicon
potentiostatic mode
electrochemical oxidation
oxidation behaviour
Online Access:https://www.mdpi.com/2079-6412/10/6/586

Internet

https://www.mdpi.com/2079-6412/10/6/586

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