| Summary: | Micro milling is a common process for micro structuring component surfaces, e.g. for manufacturing material measures that are applied for the calibration of areal surface topography measuring instruments. In this study, the surface topography of material measures is investigated using various evaluation approaches (integral approach, correlation analysis, Fourier analysis). In doing so, confocal microscope and atomic force microscope measurements are used to compare cutting parameters for the appropriate micro milling process. For two milling tools it is shown that the surface topography depends primarily on the spindle speed and much less on the feed per tooth whereas differences between the milling tools are observed in the tendency to form substructures.
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