Preparation of porous silicon nitride ceramics by microwave sintering and its performance evaluation

In this paper, the preparation methods of porous silicon nitride materials with controllable dielectric constant and pore structure were systematically studied. By using microwave sintering technology, porous silicon nitride materials with high closed pore ratio were prepared by adjusting the conten...

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Bibliographic Details
Main Authors: XIAO Chun-fang, HAN Bing
Format: Article
Language:English
Published: Elsevier 2019-11-01
Series:Journal of Materials Research and Technology
Online Access:http://www.sciencedirect.com/science/article/pii/S2238785419313274
Description
Summary:In this paper, the preparation methods of porous silicon nitride materials with controllable dielectric constant and pore structure were systematically studied. By using microwave sintering technology, porous silicon nitride materials with high closed pore ratio were prepared by adjusting the content of sintering additives and sintering process parameters, and controlling the grain boundary phase and pore structure and size. The effects of sintering conditions on the total porosity, closed porosity, pore structure and dielectric properties of materials were systematically studied. Keywords: Porous silicon nitride ceramics, Microwave sintering technology, Agglomeration process, Law of influence
ISSN:2238-7854