High-Sensitivity and Long-Life Microchannel Plate Processed by Atomic Layer Deposition

High-Sensitivity and Long-Life Microchannel Plate Processed by Atomic Layer Deposition

Abstract As a key component of electron multiplier device, a microchannel plate (MCP) can be applied in many scientific fields. Pure aluminum oxide (Al2O3) as secondary electron emission (SEE) layer were deposited in the pores of MCP via atomic layer deposition (ALD) to overcome problems such as hig...

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Bibliographic Details
Main Authors: Weiwei Cao, Bingli Zhu, Xiaohong Bai, Peng Xu, Bo Wang, Junjun Qin, Yongsheng Gou, Fanpu Lei, Baiyu Liu, Junjiang Guo, Jingping Zhu, Yonglin Bai
Format: Article
Language:English
Published: SpringerOpen 2019-05-01
Series:Nanoscale Research Letters
Subjects:
Microchannel plate (MCP)
Atomic layer deposition (ALD)
Thin film
High stability
Long lifetime
Online Access:http://link.springer.com/article/10.1186/s11671-019-2983-1

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