Avoiding transduction-induced heating in suspended microchannel resonators using piezoelectricity

• Main Authors: Damien Maillard, Annalisa De Pastina, Amir Musa Abazari, Luis Guillermo Villanueva
• Format: Article
• Language: English
• Published: Nature Publishing Group 2021-04-01
• Series: Microsystems & Nanoengineering
• Online Access: https://doi.org/10.1038/s41378-021-00254-1

Abstract Calorimetry of single biological entities remains elusive. Suspended microchannel resonators (SMRs) offer excellent performance for real-time detection of various analytes and could hold the key to unlocking pico-calorimetry experiments. However, the typical readout techniques for SMRs are optical-based, and significant heat is dissipated in the sensor, altering the measurement and worsening the frequency noise. In this manuscript, we demonstrate for the first time full on-chip piezoelectric transduction of SMRs on which we focus a laser Doppler vibrometer to analyze its effect. We demonstrate that suddenly applying the laser to a water-filled SMR causes a resonance frequency shift, which we attribute to a local increase in temperature. When the procedure is repeated at increasing flow rates, the resonance frequency shift diminishes, indicating that convection plays an important role in cooling down the device and dissipating the heat induced by the laser. We also show that the frequency stability of the device is degraded by the laser source. In comparison to an optical readout scheme, a low-dissipative transduction method such as piezoelectricity shows greater potential to capture the thermal properties of single entities.