Processing and Analysis of Long-Range Scans with an Atomic Force Microscope (AFM) in Combination with Nanopositioning and Nanomeasuring Technology for Defect Detection and Quality Control

Processing and Analysis of Long-Range Scans with an Atomic Force Microscope (AFM) in Combination with Nanopositioning and Nanomeasuring Technology for Defect Detection and Quality Control

This paper deals with a planar nanopositioning and -measuring machine, the so-called nanofabrication machine (NFM-100), in combination with a mounted atomic force microscope (AFM). This planar machine has a circular moving range of 100 mm. Due to the possibility of detecting structures in the nanome...

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Bibliographic Details
Main Authors: Ingo Ortlepp, Jaqueline Stauffenberg, Eberhard Manske
Format: Article
Language:English
Published: MDPI AG 2021-08-01
Series:Sensors
Subjects:
long-range AFM scans
planar nanopositioning
nanofabrication machine
active microcantilevers
Online Access:https://www.mdpi.com/1424-8220/21/17/5862

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