MEMS-Based Electrochemical Seismometer with a Sensing Unit Integrating Four Electrodes

MEMS-Based Electrochemical Seismometer with a Sensing Unit Integrating Four Electrodes

This paper presents a new process to fabricate a sensing unit of electrochemical seismometers using only one silicon–glass–silicon bonded wafer. By integrating four electrodes on one silicon–glass–silicon bonded wafer, the consistency of the developed sensing unit was greatly improved, benefiting fr...

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Bibliographic Details
Main Authors: Wenjie Qi, Chao Xu, Bowen Liu, Xu She, Tian Liang, Deyong Chen, Junbo Wang, Jian Chen
Format: Article
Language:English
Published: MDPI AG 2021-06-01
Series:Micromachines
Subjects:
electrochemical seismometers
integrating four electrodes
sub-micron alignment accuracy
high consistency
Online Access:https://www.mdpi.com/2072-666X/12/6/699

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