Delineation of Crystalline Extended Defects on Multicrystalline Silicon Wafers

We have selected Secco and Yang etch solutions for the crystalline defect delineation on multicrystalline silicon (mc-Si) wafers. Following experimentations and optimization of Yang and Secco etching process parameters, we have successfully revealed crystalline extended defects on mc-Si surfaces. A...

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Bibliographic Details
Main Author: Mohamed Fathi
Format: Article
Language:English
Published: Hindawi Limited 2007-01-01
Series:International Journal of Photoenergy
Online Access:http://dx.doi.org/10.1155/2007/18298

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