Fabrication of Al2O3/Al structure by nitric acid oxidation at room temperature

Fabrication of Al2O3/Al structure by nitric acid oxidation at room temperature

Bibliographic Details
Main Authors:	Iwata Takashi, Matsumoto Taketoshi, Terakawa Sumio, Kobayashi Hikaru
Format:	Article
Language:	English
Published:	De Gruyter 2010-12-01
Series:	Open Physics
Subjects:	nitric acid oxidation aluminum oxide mos gate insulator
Online Access:	https://doi.org/10.2478/s11534-010-0014-z

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