A Differential Resonant Accelerometer with Low Cross-Interference and Temperature Drift

A Differential Resonant Accelerometer with Low Cross-Interference and Temperature Drift

Presented in this paper is a high-performance resonant accelerometer with low cross-interference, low temperature drift and digital output. The sensor consists of two quartz double-ended tuning forks (DETFs) and a silicon substrate. A new differential silicon substrate is proposed to reduce the temp...

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Bibliographic Details
Main Authors: Bo Li, Yulong Zhao, Cun Li, Rongjun Cheng, Dengqiang Sun, Songli Wang
Format: Article
Language:English
Published: MDPI AG 2017-01-01
Series:Sensors
Subjects:
accelerometer
quartz resonator
low temperature drift
low cross-interference
Online Access:http://www.mdpi.com/1424-8220/17/1/178

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