A Differential Resonant Accelerometer with Low Cross-Interference and Temperature Drift

A Differential Resonant Accelerometer with Low Cross-Interference and Temperature Drift

Presented in this paper is a high-performance resonant accelerometer with low cross-interference, low temperature drift and digital output. The sensor consists of two quartz double-ended tuning forks (DETFs) and a silicon substrate. A new differential silicon substrate is proposed to reduce the temp...

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Main Authors: Bo Li, Yulong Zhao, Cun Li, Rongjun Cheng, Dengqiang Sun, Songli Wang
Format: Article
Language:English
Published: MDPI AG 2017-01-01
Series:Sensors
Subjects:
accelerometer
quartz resonator
low temperature drift
low cross-interference
Online Access:http://www.mdpi.com/1424-8220/17/1/178
id doaj-34b92e41b707442892ac57268212332b
record_format Article
spelling doaj-34b92e41b707442892ac57268212332b2020-11-24T22:13:39ZengMDPI AGSensors1424-82202017-01-0117117810.3390/s17010178s17010178A Differential Resonant Accelerometer with Low Cross-Interference and Temperature DriftBo Li0Yulong Zhao1Cun Li2Rongjun Cheng3Dengqiang Sun4Songli Wang5State Key Laboratory for Manufacturing System Engineering, Xi’an Jiaotong University, Xi’an 710049, ChinaState Key Laboratory for Manufacturing System Engineering, Xi’an Jiaotong University, Xi’an 710049, ChinaState Key Laboratory for Manufacturing System Engineering, Xi’an Jiaotong University, Xi’an 710049, ChinaState Key Laboratory for Manufacturing System Engineering, Xi’an Jiaotong University, Xi’an 710049, ChinaState Key Laboratory for Manufacturing System Engineering, Xi’an Jiaotong University, Xi’an 710049, ChinaAviation Key Laboratory of Science and Technology on Inertia, Flight Automatic Control Research Institute, Xi’an 710065, ChinaPresented in this paper is a high-performance resonant accelerometer with low cross-interference, low temperature drift and digital output. The sensor consists of two quartz double-ended tuning forks (DETFs) and a silicon substrate. A new differential silicon substrate is proposed to reduce the temperature drift and cross-interference from the undesirable direction significantly. The natural frequency of the quartz DETF is theoretically calculated, and then the axial stress on the vibration beams is verified through finite element method (FEM) under a 100 g acceleration which is loaded on x-axis, y-axis and z-axis, respectively. Moreover, sensor chip is wire-bonded to a printed circuit board (PCB) which contains two identical oscillating circuits. In addition, a steel shell is selected to package the sensor for experiments. Benefiting from the distinctive configuration of the differential structure, the accelerometer characteristics such as temperature drift and cross-interface are improved. The experimental results demonstrate that the cross-interference is lower than 0.03% and the temperature drift is about 18.16 ppm/°C.http://www.mdpi.com/1424-8220/17/1/178accelerometerquartz resonatorlow temperature driftlow cross-interference
collection DOAJ
language English
format Article
sources DOAJ
author Bo Li
Yulong Zhao
Cun Li
Rongjun Cheng
Dengqiang Sun
Songli Wang
spellingShingle Bo Li
Yulong Zhao
Cun Li
Rongjun Cheng
Dengqiang Sun
Songli Wang
A Differential Resonant Accelerometer with Low Cross-Interference and Temperature Drift
Sensors
accelerometer
quartz resonator
low temperature drift
low cross-interference
author_facet Bo Li
Yulong Zhao
Cun Li
Rongjun Cheng
Dengqiang Sun
Songli Wang
author_sort Bo Li
title A Differential Resonant Accelerometer with Low Cross-Interference and Temperature Drift
title_short A Differential Resonant Accelerometer with Low Cross-Interference and Temperature Drift
title_full A Differential Resonant Accelerometer with Low Cross-Interference and Temperature Drift
title_fullStr A Differential Resonant Accelerometer with Low Cross-Interference and Temperature Drift
title_full_unstemmed A Differential Resonant Accelerometer with Low Cross-Interference and Temperature Drift
title_sort differential resonant accelerometer with low cross-interference and temperature drift
publisher MDPI AG
series Sensors
issn 1424-8220
publishDate 2017-01-01
description Presented in this paper is a high-performance resonant accelerometer with low cross-interference, low temperature drift and digital output. The sensor consists of two quartz double-ended tuning forks (DETFs) and a silicon substrate. A new differential silicon substrate is proposed to reduce the temperature drift and cross-interference from the undesirable direction significantly. The natural frequency of the quartz DETF is theoretically calculated, and then the axial stress on the vibration beams is verified through finite element method (FEM) under a 100 g acceleration which is loaded on x-axis, y-axis and z-axis, respectively. Moreover, sensor chip is wire-bonded to a printed circuit board (PCB) which contains two identical oscillating circuits. In addition, a steel shell is selected to package the sensor for experiments. Benefiting from the distinctive configuration of the differential structure, the accelerometer characteristics such as temperature drift and cross-interface are improved. The experimental results demonstrate that the cross-interference is lower than 0.03% and the temperature drift is about 18.16 ppm/°C.
topic accelerometer
quartz resonator
low temperature drift
low cross-interference
url http://www.mdpi.com/1424-8220/17/1/178
work_keys_str_mv AT boli adifferentialresonantaccelerometerwithlowcrossinterferenceandtemperaturedrift
AT yulongzhao adifferentialresonantaccelerometerwithlowcrossinterferenceandtemperaturedrift
AT cunli adifferentialresonantaccelerometerwithlowcrossinterferenceandtemperaturedrift
AT rongjuncheng adifferentialresonantaccelerometerwithlowcrossinterferenceandtemperaturedrift
AT dengqiangsun adifferentialresonantaccelerometerwithlowcrossinterferenceandtemperaturedrift
AT songliwang adifferentialresonantaccelerometerwithlowcrossinterferenceandtemperaturedrift
AT boli differentialresonantaccelerometerwithlowcrossinterferenceandtemperaturedrift
AT yulongzhao differentialresonantaccelerometerwithlowcrossinterferenceandtemperaturedrift
AT cunli differentialresonantaccelerometerwithlowcrossinterferenceandtemperaturedrift
AT rongjuncheng differentialresonantaccelerometerwithlowcrossinterferenceandtemperaturedrift
AT dengqiangsun differentialresonantaccelerometerwithlowcrossinterferenceandtemperaturedrift
AT songliwang differentialresonantaccelerometerwithlowcrossinterferenceandtemperaturedrift
_version_ 1725800301228720128

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